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  • Product Name
    Pressurized oven for HA series semiconductor packaging
  • Product Name
    High temperature Autoclave
  • Product Summary
    It is a facility that removes internal bubbles and voids through isotropic compression at a certain pressure using gas while curing epoxy resin. Process efficiency is high by simultaneously curing and defoaming processes.
  • Overview
    User convenience | Uniform temperature control | Highest safety
    除消耗品外 X
  • Contact us
    +82-42-602-8028
  • Application field
    Pressurized oven that can be used at high temperatures, mainly used for semiconductor packing process
  • 맞춤
    Conditions other than the standard specification can be custom-made, so please consult your sales representative.
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商品详情



High temperature Autoclave

Pressurized oven for HA series semiconductor packaging

Constant temperature pressurized autoclave designed to be applied to the semiconductor industry

High Pressure Vessel

Designed with a safe design

- Designed by ASME
- Domestic industrial safety and gas safety inspection
- China SEL certification available


Fan System

Composition specialized for clean room

The only patent in Korea from the integration of the driving part to the installation of a dust-free system rotating part safety cover
* Material : SUS use





Heating System

Easy to attach and detach

100% guide for the best air flow Designed to minimize losses





Main O-ring

O-Ring life extension / Selection of material suitable for temperature / No foreign matter







V.F.T(Valves, Fittings & Tubing)

Perfect piping treatment
with more than 20 years of know-how!


Selection of materials that do not cause problems with high pressure use, flow charts visible at a glance, each tag is used




Main control panel

Easy operation and
excellent performance control panel


   
 





PCO - HA Series

Temperature/Presssure TEST DATA


Series Inside diameter(mm) Inside depth(mm) Pressure (bar) Temperature (°C) Material
HA-6322 680 350 20 200 SUS304
HA-6622 680 630 20 200 SUS304
HA-7622 720 630 20 200 SUS304
HA-7822 760 800 20 200 SUS304
HA-8422 800 400 20 200 SUS304
Model Working Vessel Dia Working Temperature Working Pressure Temp.UNIFORMITY : ±3℃ within Pressure UNIFORMUTY : ±3℃within Dimension
PCO - HA Series Ø 800mm X 400mm [2 chamber] ~ 80℃ ~ 20kg/cm2 UNIFORMITY : ±3℃ within UNIFORMITY : ±3BAR within 2,910(W) X 1,912(D) X 1,854(H)